Item | Specification |
Max Size of Substrate (W x L , for now ) | 550x650 |
Cell Position :the distance from counterpoint to cell | ≤100μm |
Cell Position :the distance from substrate edge to cell | ≤200μm |
Cell Size ( can be customized ) | ≥250μm |
Error of Etching Depth | ≤±10% |
Flatness of Etching surface | ≤±30μm |
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