EHFP-R Type | EHFP-S Type | |
Coating approach | Roller / Shower | Spin Type |
Thickness (um) | 40 ~ 50 | 10 ~ 20 |
Pre-Bake | 80 ℃ - 30 min | 100 ℃ -3 min |
Exposure | Depending on Aligner | Depending on Aligner |
Developer | Na2CO3 | KOH/TMAH |
All Shot Exposure | Yes | None |
Max HF Concentration | ≤ 30% | ≤ 30% |
Stripper | NaOH / KOH | NaOH / KOH |
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