正型光阻產品 EPPR Series : Positive Type PR
Positive Type PR
Items |
EPPR Series |
Coating type |
Spin/Slit + Spin/Spinless/Roller |
Viscosity |
3~40 c.P. |
Solid content |
10%~25% |
Solvent type |
PGMEA / Other EL Grade Solvent |
Thickness Uniformity |
< 3% |
Film thickness loss (um) |
< 0.1 |
Thermal resistance (℃) |
150 |
Anti-Etching property |
OK |
Stripping property |
OK |
Process Parameters
Substrate |
ITO/Cr/Mo |
Substrate |
ITO/Cr/Mo |
Vacuum Dry |
2 torr/40sec |
Pre-baking (Hotplate, contact) |
110 ℃/ 120s |
Exposure Equipment |
Ushio Aligner with 20~ 40 mW/cm2 |
Gap |
100 μm |
Post-baking (Clean Oven) |
140 ℃/ 300sec |
Stripper |
25 ℃/ 300sec |
Sensitivity of EPPR Series
Etching Test v.s. Film Thickness
|
Just Erch |
1.5X JE |
2X JE |
CD Loss(um) |
0.000 |
0.120 |
0.294 |
Film THK(um) |
1.445 |
1.446 |
1.443 |
黑色光阻產品 EBM Series : BM PR
EBM Series : BM PR
OD |
Viscosity(c.P.) |
Surface Resistance (Ω/ cm2) |
Application |
2 |
2~5 |
>10E+12 |
Touch panel frame |
2.6 |
2~5 |
1E+13 |
Touch panel frame / CF matrix |
2~5 |
2~5 |
3.0 ~ 4.4 |
2~5 |
< 1E+14 |
CF matrix |
2~5 |
2~2.6 |
2~60 |
- |
Ink Jet / Spray |
白色/ 特殊色光阻劑 White BM PR / Special Color BM PR
White BM PR / Special Color BM PR
彩色光阻產品 Series: Color PR
Color PR
Item |
Coating Type |
Chrominance |
Application |
ECR(Red) Series |
Slit /Spin |
Customized |
TFT / STN / TN |
ICR (Red) Series |
Ink Jet / Spray |
Customized |
3D Coating / Repair |
ECG(Green) |
Slit /Spin /Ink Jet |
Customized |
TFT / STN / TN |
ICG (Green) Series |
Ink Jet / Spray |
Customized |
3D Coating / Repair |
ECB(Blue) |
Slit /Spin /Ink Jet |
Customized |
TFT / STN / TN |
ICB (Green) Series |
Ink Jet / Spray |
Customized |
3D Coating / Repair |
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