抗玻璃蝕刻光阻產品 EHFP Series : HF Protecting PR

HF Protecting PR

EHFP-R Type EHFP-S Type
Coating approach Roller / Shower Spin Type
Thickness (um) 40 ~ 50 10 ~ 20
Pre-Bake 80 ℃ - 30 min 100 ℃ -3 min
Exposure Depending on Aligner Depending on Aligner
Developer Na2CO3 KOH/TMAH
All Shot Exposure Yes None
Max HF Concentration ≤ 30% ≤ 30%
Stripper NaOH / KOH NaOH / KOH
抗玻璃蝕刻光阻產品 EHFP Series : HF Protecting PR 抗玻璃蝕刻光阻產品 EHFP Series : HF Protecting PR

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