正型光阻產品 EPPR Series : Positive Type PR
Positive Type PR
| Items |
EPPR Series |
| Coating type |
Spin/Slit + Spin/Spinless/Roller |
| Viscosity |
3~40 c.P. |
| Solid content |
10%~25% |
| Solvent type |
PGMEA / Other EL Grade Solvent |
| Thickness Uniformity |
< 3% |
| Film thickness loss (um) |
< 0.1 |
| Thermal resistance (℃) |
150 |
| Anti-Etching property |
OK |
| Stripping property |
OK |
Process Parameters
| Substrate |
ITO/Cr/Mo |
| Substrate |
ITO/Cr/Mo |
| Vacuum Dry |
2 torr/40sec |
| Pre-baking (Hotplate, contact) |
110 ℃/ 120s |
| Exposure Equipment |
Ushio Aligner with 20~ 40 mW/cm2 |
| Gap |
100 μm |
| Post-baking (Clean Oven) |
140 ℃/ 300sec |
| Stripper |
25 ℃/ 300sec |
Sensitivity of EPPR Series
Etching Test v.s. Film Thickness
|
Just Erch |
1.5X JE |
2X JE |
| CD Loss(um) |
0.000 |
0.120 |
0.294 |
| Film THK(um) |
1.445 |
1.446 |
1.443 |
黑色光阻產品 EBM Series : BM PR
EBM Series : BM PR
| OD |
Viscosity(c.P.) |
Surface Resistance (Ω/ cm2) |
Application |
| 2 |
2~5 |
>10E+12 |
Touch panel frame |
| 2.6 |
2~5 |
1E+13 |
Touch panel frame / CF matrix |
| 2~5 |
| 2~5 |
| 3.0 ~ 4.4 |
2~5 |
< 1E+14 |
CF matrix |
| 2~5 |
| 2~2.6 |
2~60 |
- |
Ink Jet / Spray |
白色/ 特殊色光阻劑 White BM PR / Special Color BM PR
White BM PR / Special Color BM PR
彩色光阻產品 Series: Color PR
Color PR
| Item |
Coating Type |
Chrominance |
Application |
| ECR(Red) Series |
Slit /Spin |
Customized |
TFT / STN / TN |
| ICR (Red) Series |
Ink Jet / Spray |
Customized |
3D Coating / Repair |
| ECG(Green) |
Slit /Spin /Ink Jet |
Customized |
TFT / STN / TN |
| ICG (Green) Series |
Ink Jet / Spray |
Customized |
3D Coating / Repair |
| ECB(Blue) |
Slit /Spin /Ink Jet |
Customized |
TFT / STN / TN |
| ICB (Green) Series |
Ink Jet / Spray |
Customized |
3D Coating / Repair |
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