|Max Size of Substrate (W x L , for now )||550x650|
|Cell Position ：the distance from counterpoint to cell||≤100μm|
|Cell Position ：the distance from substrate edge to cell||≤200μm|
|Cell Size ( can be customized )||≥250μm|
|Error of Etching Depth||≤±10%|
|Flatness of Etching surface||≤±30μm|
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